Consultez les proceedings de la Conference COMSOL 2024
When the production capacity of micro chemical plants is increased by numbering-up approach, it is important to realize the uniform flow distribution among the parallelized microreactors. In addition, a blocked microreactor needs to be identified as early as possible to achieve the ... En savoir plus
Chemical vapor deposition (CVD) is widely used in various fields including the fabrication of electronic devices due to its uniform film formation capability on the large-scale wafers and the minute 3D structures. In CVD, precursors (metal compounds) are commonly reacted in gas-phase as ... En savoir plus
We have proposed a high performance MEMS based microstructure array of micropreconcentrator (microPC) for breath diagnosis of cancer biomarkers. Our microPC has been designed based on quantitative analysis results, which gives explicit evaluation criteria for determination of ... En savoir plus
It is possible to obtain novel functions using nano-scaled structures and related physics that are impossible to be realized by conventional macro-scale technology. Thus, we are trying to understand the physics dominated by nanostructure and to develop the biosensing applications. Here, ... En savoir plus
We have developed micro/nano machines such as optically driven micro/nano pumps and spiral-shaped piezoelectric vibration energy harvesters. COMSOL Multiphysics has been used for the design and development of the micro/nano machines. For example, optical force affected to a metallic ... En savoir plus
We, Sumitomo Heavy Industries, Ltd. have been developing a microwave ion source since 2011. The design of the chamber is important to generate plasma efficiently. The plasma chamber was designed with the COMSOL Multiphysics RF module, and reported the results at this conference last ... En savoir plus
The numerical model can be dynamically modified and analyzed by using the COMSOL Java API. We estimated the relative permittivity, diameter and position of the dielectric in a experiment device based on the electric potential and the capacitance of experimental results. The estimation ... En savoir plus
On one hand, the "float polishing" process consists of a tin lap having many concentric grooves, cut from a flat by single point diamond turning. This lap is rotated above a hydrostatic bearing spindle of high rigidity, damping and rotational accuracy. The optical surface thus floats ... En savoir plus
Debris, micro particles produced by discharges, stay in the gap area during deep hole machining by micro EDM, cause short-circuits and abnormal discharges, finally make machining impossible. Although a deep hole can be processed by using the tool with grooves on the surface, the effect ... En savoir plus