Articles techniques et présentations

An automated design tool using COMSOL Multiphysics 3.5a and a genetic algorithm was developed to improve the performance of a MEMS resonant mass sensor. The device was comprised of a fixed-free poly-silicon micro-cantilever beam with electrostatic actuation and capacitive sensing. The discretized design variables included material distribution, sensing and actuation electrode placement, length of the initial gap, actuation voltage, and beam thickness. The cantilever model makes use of three COMSOL Multiphysics Applications - 3D Structural with Squeezed Film Damping (SMSLD plus MMFD), Deformed Mesh (ALE) and Electrostatics (EMES). This paper will describe the details of the COMSOL Multiphysics model and the optimization program used for automated design improvement of a MEMS sensor, including a discussion of results from a sample run.