Articles techniques et présentations

This work presents the study of spiral RF MEMS switch which has low actuation voltage due to spiral structure. This work is inspired by the superior performance of electrostatic RF MEMS switches over the conventional state-of-the-art solid-state devices and the potential applications in communication field. The customary high actuation voltage limits the reliability and applications especially in wireless communication, and hence focus on the realization of electrostatic low actuation voltage switches is rapidly increasing. The optimization of actuation voltage is achieved by analyzing the flexure design, beam topology, actuation electrodes and gap height using COMSOL Multiphysics models which are validated by simulations. It is observed that with more and more number of spiral ring structure actuation voltages can be reduced. The serpentine structure is suitable for low actuation switch is modeled and simulated in COMSOL Multiphysics. This developed switch has lowest pull-in voltage compared to other two geometries as shown in Figure 1, 2,3 and 4.