Articles techniques et présentations

The presented paper describes a method for micro precision assembly of very small objects like future microchips, which have a lateral expansion equal to or smaller than 500 μm. The modelling and simulation of a fluidicbased micro assembly method for a microchip with a dimension of (500 x 500 x 100) μm³ is performed with COMSOL Multiphysics. The finite element method is used for modelling and simulation. The physical problem is modelled as a transient 2D Fluid-Structure Interaction (FSI) containing two separated fluid phases and a rigid body (microchip). The movement of the microchip is induced by the fluid and is described by the arbitrary Lagrangian-Eulerian (ALE) technique. The separated two-phase flow is modelled by using the Phase Field Method. Results from numerical analysis and simulations were evaluated.