Simulation of MEMS based Flexible Flow Sensor for Biomedical Application

D. Maji[1], C. P. Ravikumar[2], and S. Das[1]
[1]School of Medical Science and Technology, Indian Institute of Technology, Kharagpur, West Bengal, India
[2]Texas Instruments (India) Pvt. Ltd., Bangalore, India
Publié en 2011

Arterial disease, especially Coronary Artery Disease (CAD) is one of the leading causes of premature morbidity and mortality. During the flow, blood interacts with vessel wall mechanically and chemically which modulates the plaque formation in blood vessel leading to coronary artery diseases. Here we propose to simulate a MEMS based flexible flow sensor based on anemometer principle designed to be integrate at a catheter tip.

This sensor will be useful for on-line monitoring of body fluid during catheter based operation. Simulation work has been carried out in COMSOL 4.1 which includes optimal resistive heater design and identification of suitable substrate material for realization of the heater on a flexible polymer followed by its steady as well as transient CFD analysis.

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