Articles techniques et présentations

With the development of micro and nanotechnologies, integrated structures based on piezoelectric thin films are widely investigated and their characterization become a crucial issue for the development of new applications. A laser interferometry is here used to assess the mechanical response in quasistatic regime of a piezoelectric sample. To complete this experimental approach, a numerical study based on the finite element method is carried out thanks to COMSOL Multiphysics® FEA software. We specifically model three piezoelectric samples in 3D: a PZ27 ceramic rod (with dimensions 2x2x15 mm), a PZ27 ceramic cylinder (20mm diameter, 2 mm thick) and a 240 nm PbZr0.52Ti0.48O3 film covered by a Pt electrode laid on a Si (100 oriented)/SiO2/TiO2/Pt structure. For each sample, a time dependent analysis is performed.