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Light Scattering Simulation of Nano-objects on the Surface of Silicon Wafers by 3D Finite Element Method
Publié en 2011
Nanotechnology is rated as a key technology of the 21st century. In the field of nano-optics already at present, state-of-the-art scientific experiments and industrial applications exhibit nanometer to sub-nanometer design tolerances. This motivates the development and application of fast and accurate simulation tools for these fields or electromagnetic (EM) field.
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