Development of Ultrasonic Transducers Based on PZT Piezoelectric Thin Films
As the ultrasonic sensor industry evolves towards lower costs, miniaturization, higher integration, and superior performance, Microelectromechanical Systems (MEMS)-based ultrasonic transducers have emerged as a prominent trend. This article introduces a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device utilizing a PZT (Lead Zirconate Titanate) piezoelectric thin film. Through the establishment of a three-dimensional model via finite element simulation, the study delves into structural optimization, transmission characteristic analysis, and the acoustic field behavior of PMUT devices in an aqueous environment. This exploration offers novel insights and potential applications for PMUT devices in medical fields, fingerprint recognition and object detection, medical imaging, and various other sectors.
