Design Optimization of Piezoelectric Micro-machined Modal Gyroscope
A solid state Piezoelectric Micro Machined Modal Gyroscope is a vibratory type of gyroscope which sense the motion by voltage induced due to Coriolis force. It utilizes natural frequency of the structure to maximize the displacements and hence maximizing the induced voltage signals for sensing.The mode suitable for gyroscopic motion is 9th mode, which was found to be vibrating at 350.217 kHz. A design modification is introduced and its modal and harmonic analyses are done. The new structure is found to be vibrating at 3.064 kHz. Also the modified structure has two distinct vibratory modes which are symmetric making it ideal for dual axis sensing. Having lower modal frequency and larger vibratory amplitude causes increase in sensitivity of the gyroscope.
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