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Design of a MEMS Bolometer with Absorptive Element as Piezo-Protein
Publié en 2016
Bolometer is a thermal infrared sensor used for measuring the intensity of radiation via the heating of a material due to the radiations. A bolometer consists of an absorptive element, a thin layered material, connected to a thermal reservoir. The result is that any radiation received on the absorptive element raises its temperature above that of the reservoir: the greater the absorbed radiation, the higher the temperature. The element is thus deformed proportional to the temperature of radiation and thus the temperature is measured. This paper presents a design of the said bolometer with absorptive element as a biologically sensitive material namely a Piezo-Protein which can be employed for biosensing applications.
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