Capacitive Micromachined Ultrasonic Transducer with Lumped Model
Application ID: 112871
This tutorial demonstrates how a lumped model of a MEMS transducer can be derived from its FEM model. It includes an FEM model of a capacitive micromachined ultrasonic transducer (CMUT) and the corresponding lumped model created using the Lumped Mechanical System (LMS) interface. The parameters of the LMS model were obtained from the Parameter Estimation study.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® et
- Module Multibody Dynamics et
- soit le Module AC/DC, ou Module MEMS et
- soit le Module MEMS, ou Module Structural Mechanics
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille des Spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.