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BAW resonator - guidelines for making a 3D model

Posted 8 nov. 2015, 14:26 UTC−5 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Geometry, Modeling Tools & Definitions, Parameters, Variables, & Functions Version 5.0 1 Reply

Tithi
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Hi all,

I am currently simulating Thin film BAW resonator. The existing model in COMSOL is 2D and the pdf provided also helps with building only the 2D model.
I am looking to simulate a 3D model of BAW resonator , a similar one as in the attached paper.
Kindly assist as to how to build a 3D model of a thin film BAW resonator.

Thank you so much

Tithi

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1 Reply Last Post 17 nov. 2015, 02:26 UTC−5
Nicolas Kurz
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Posted: 9 years ago 17 nov. 2015, 02:26 UTC−5
Hi Tithi,

Your question might not precise enough. If you just ask for how to build the 2D model as a 3D model, then you can proceed pretty similar to the example given in COMSOL but instead of choosing 2D you choose 3D in the dimension selection.

Best,
Nicolas
Hi Tithi, Your question might not precise enough. If you just ask for how to build the 2D model as a 3D model, then you can proceed pretty similar to the example given in COMSOL but instead of choosing 2D you choose 3D in the dimension selection. Best, Nicolas

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