Pull-In and Pull-Out Analysis of a Biased Resonator — 2D
Application ID: 22141
An electrostatically actuated MEMS resonator is simulated. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. In this example, the pull-in and pull-out voltages of the resonator are computed. This is done via a quasi-static analysis of the displacement-voltage trajectory of the full range of motion, from the initial relaxed state all the way to the pulled-in flattened state.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® et
- soit le Module AC/DC, ou Module MEMS et
- soit le Module MEMS, ou Module Structural Mechanics
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille des Spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.