Disc Resonator Anchor Losses
Application ID: 21031
This model shows how to compute the anchor loss limited quality factor of a diamond disc resonator. The resonator is anchored to the substrate by a polysilicon post and power is transmitted to the substrate through the post. A perfectly matched layer is used to represent the essentially infinite substrate. The model is based on a paper presented at the 2007 COMSOL conference in Grenoble:
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® et
- soit le Module Acoustics, Module MEMS, ou Module Structural Mechanics
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille des Spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.