A 2D Biased Resonator: Stationary, Eigenfrequency, Frequency Domain, and Pull-In Analyses
Application ID: 11751
Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator, designed as part of a micromechanical filter, is analyzed in detail.
The Stationary Analysis of a Biased Resonator model performs a stationary analysis of the resonator, with an applied DC bias. It is used as a basis for all the subsequent analyses, briefly described below.
- The Frequency Response of a Biased Resonator model performs frequency domain analysis of the structure, which is also biased with its operating DC offset.
- The Normal Modes of a Biased Resonator model performs a modal analysis on the resonator, with and without an applied DC bias.
- The Pull-in Voltage for a Biased Resonator model performs a pull-in analysis of the structure, to predict the point at which the biased system becomes unstable.
- The Transient Response of a Biased Resonator model performs a transient analysis of the response of the structure when a step function is applied to the resonator.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® et
- soit le Module AC/DC, ou Module MEMS et
- soit le Module MEMS, ou Module Structural Mechanics
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille des Spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.