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Electromechanical Response of Comb Drive and Folded Spring
Posted 14 août 2013, 14:46 UTC−4 Low-Frequency Electromagnetics, MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Mesh, Structural Mechanics Version 4.3b 1 Reply
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I am trying to simulate the electromechanical response of a comb drive capacitor and flexure folded spring. However, I have been struggling with creating the proper meshing and receiving the correct response from the device. In the model I have attached I cannot change the mesh size without it failing. Also, the simulations will not allowing me to apply over 25 volts without failing and giving me the following error message.
Failed to find a solution.
In segregated group 3:
Very ill-conditioned preconditioner.
The relative residual is more than 1000 times larger than the relative tolerance.
Returned solution has not converged.
I have been using COMSOL for several months, but do not have a very deep understanding of it yet. I am not quite sure what I am doing wrong here. Any advice? Thanks!
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