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electromechanics

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Hi,
Can anybody tell me how to apply vaccum of 70-mtorr around my model clamped-clamped beam resonator.Something like keeping my model inside a chamber of vaccum.

2 Replies Last Post 20 avr. 2013, 00:57 UTC−4
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)

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Posted: 1 decade ago 19 avr. 2013, 15:46 UTC−4
Hi

you have the MEMS example in the library of Couette flow around a MEMS accelerometer that is worth a look. And probably there are some options, pre-cooked, in the microflow module (but I do not have that one)

--
Good luck
Ivar
Hi you have the MEMS example in the library of Couette flow around a MEMS accelerometer that is worth a look. And probably there are some options, pre-cooked, in the microflow module (but I do not have that one) -- Good luck Ivar

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Posted: 1 decade ago 20 avr. 2013, 00:57 UTC−4
Hi,
Thanks for your suggestion.I will try what you said.
Hi, Thanks for your suggestion.I will try what you said.

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