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CCP PLASMA SIMULATION

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Hi, I have a question: where is the RF cycle set for the CCP plasma simulation in the case. Only N is set in the parameter and is not used. In addition,can low-frequency plasma be simulated?(2Mhz)



0 Replies Last Post 5 janv. 2006, 23:53 UTC−5
COMSOL Moderator

Hello 云鹏 何

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