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capacitive pressure sensor model

Posted 6 mars 2012, 11:32 UTC−5 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Studies & Solvers, Structural Mechanics Version 3.5a, Version 4.2 0 Replies

Bahar
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Hi

I have a question about 2D capacitive pressure sensor model. I can not understand the role of Trapezoidal part in its structure. Is this considered to be a vacuum? for reference pressure? Also I can not understand where exactly the pressure will be applied? I mean should we consider that small air gap is the place where different pressures should be applied to? or the pressure will be applied on top of that air gap (in trapezoidal region) [although based on deformation it doesn't seems correct). I would be really grateful if someone can give me a bit of explanations.

Best
Bahar
0 Replies Last Post 6 mars 2012, 11:32 UTC−5
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