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Mems resonator

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Does anybody have information or documents regarding the power driving of mems resonators? Are they dc powered? ac powered? both? I look around on Google and Google scholar but found very little info as to the types of power sources and characteristics of sources for mems resonators. All help is appreciated.
Best regards,
H.K.

0 Replies Last Post 10 janv. 2017, 12:35 UTC−5
COMSOL Moderator

Hello Hamed Kourouma

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