SITE/GaAs_SURFACE/    SDEN/7.75E-9/
As_Ga(s) Ga(s) GaC2H6(s) GaC2H5(s) C2H5(s) H(s) C2H5_Ga(s) H_Ga(s)
END
ELEMENTS
O  H  C  As	 Ga
END
SPECIES
H2      H       C       CH3     GaC6H15 GaC4H10 GaC2H6  GaH2    
GaAs    AsH3    C2H6    C2H5    C2H4    CH4     CH3
END
REACTIONS
GaC6H15=>GaC4H10+C2H5                    1.000E+15     .000   46606.12
GaC4H10=>GaC2H6+C2H4                     1.000E+18     .000   46606.12
GaC2H6=>GaH2+C2H4                        1.000E+18     .000   46606.12
C2H5+H2<=>C2H6+H                         3.100E+00    3.600    8508.60
 REV / 5.5E+02    3.500    5210.33 /
C2H5+H=>2CH3                             3.600E+13     .000        .00
CH3+H2=>CH4+H                            2.900E+02    3.120    8699.81
2CH3=>C2H6                               2.000E+12     .000        .00
C2H4+H=>C2H5                             1.500E+08    1.490    9990.44
2H+H2=>2H2                               1.000E+18     .000        .00
GaC6H15=>GaC2H5(s)+2C2H5                 1.453E-02    0.500    4995.22
GaC2H6=>GaC2H6(s)                        1.822E-02    0.500        .00
GaC2H6(s)=>GaC2H6                        5.000E+08     .000   34894.84
GaH2=>Ga(s)+2H                           2.148E-02    0.500        .00
GaC2H6(s)=>Ga(s)+C2H5+H                  5.000E+11     .000   32026.77
AsH3=>As_Ga(s)+3H						             1.133E-02    0.500    4995.22
C2H5=>C2H5(s)					                   3.377E-02    0.500        .00
C2H5(s)=>C2H5				      	             7.900E+11     .000   36089.86
C2H5=>C2H5_Ga(s)			     	             1.858E-02    0.500        .00
C2H5_Ga(s)=>C2H5					               7.900E+11     .000   36089.86
C2H5(s)=>C2H4+H(s)		         	         2.500E+10     .000   32026.77	
C2H5_Ga(s)=>C2H4+H_Ga(s)                 2.500E+10     .000   32026.77
H(s)=>H	                                 7.200E+05     .000   16108.99
H_Ga(s)=>H	                             7.200E+05     .000   16108.99
GaC2H5(s)+As_Ga(s)=>GaAs+C2H5            1.100E+10     .000     999.04
Ga(s)+As_Ga(s)=>GaAs                     1.100E+10     .000     999.04
END