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Can not find Pull-in Voltage for very thin beam (Thickness = 600[nm])
Posted 17 déc. 2015, 08:56 UTC−5 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 5.0 0 Replies
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I am new in COMSOL. I am following the technique used in the model "Pull-in Voltage for a Biased Resonator 3D" in order to apply to my device. The beam is shown in attached photo. The fixed boundary is in red. The technique works well for the same beam with thickness = 2[um]. However, when it is changed into 600[nm], COMSOL gave error.
If you have some idea to solve it, please share. Thank you very much for your time.
Best regards
Duc
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Hello Duy Duc Nguyen
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