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Resonant Frequency for comb accelerometer
Posted 13 nov. 2013, 05:10 UTC−5 MEMS & Nanotechnology, MEMS & Piezoelectric Devices 1 Reply
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i really hope that i can get input from you all.
I modelling a capacitive comb accelerometer. See picture attached.
I have used:
Solid Mechanic - to get displacement
Electrostatic- to get capacitance
To get the model moving i have put -a*solid.rho at the body load in Solid Mechanics
to get the resonant freq, i used eigenfrequency study and the simulation value that i've got is different from the calculation .
I used the equation f = (sqrt(k/M)/2*pi to get my calculation value of resonant.
is the any thing in the eigenfrequency that i need to set up ?
PLEASE HELP
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Hello Nisa K
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I am also getting the same problem. Could you find the solution. Please let me know.