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implementation of COMSOL ECMP model showcased in COMSOL Conference at Boston

Sakthi Jaya Rahul Ravichandran

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Can any one help me out in implementing the comsol model given in the paper " experimental validation of model of electrochemical mechanical planarization of copper". I have been working on it for several days.i tried a lot following the steps given in page 4 of this paper. But couldnt get the desired output. The major doubt I have is how do I enter a PDE equation manually in comsol under user defined function.

0 Replies Last Post 25 avr. 2013, 13:48 UTC−4
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Hello Sakthi Jaya Rahul Ravichandran

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