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3D capacitive pressure sensor analysis in COMSOL 3.2.0

Posted 13 oct. 2010, 06:35 UTC−4 0 Replies

Ashwin Simha
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Dear All,

I have been using COMSOL for a few months now . I would like to analyse a MEMS 3D capacitive pressure sensor. I tried to couple Electrostatic ,solid stress strain module along with the moving mesh(ALE) but I get a message ' fatal error '. Could someone share with me the detailed procedure for coupling these subdomains. Please find attached the simple geometry I would like to use. The middle rectangular plate represents air and other two rectangular plates represents the plates of the capacitor.

Thanks in advance,

Best regards,
Ashwin Simha.
NITK Surathkal.

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0 Replies Last Post 13 oct. 2010, 06:35 UTC−4
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Hello Ashwin Simha

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