Consultez les proceedings de la Conference COMSOL 2024
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent ... En savoir plus
We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a ... En savoir plus
INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the ... En savoir plus
Sensorineural hearing loss is the most common sensory deficit in the world, and within this category damage or loss of the primary sensory cells of the inner ear, known as hair cells is the most common cause [1]. Partial hearing loss is addressed by the use of hearing aids, electronic ... En savoir plus
A dual axis MEMS seismometer targeted for building monitoring system has been simulated for a full scale of ±5g acceleration. The design uses the capacitive effect for vibration sensing. This comb drive capacitive MEMS seismometer consists of 8 springs with two proof masses. The device ... En savoir plus
This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. The actuation mechanism is Lorentz force enabling low current (below 10 mA) operation. The actuator combined with an overlying aluminum coated SU-8 soft polymer membrane for the ... En savoir plus
Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with minimal mass. When reflective coatings (usually metallic Au or Al) are applied to micromirror surfaces in order to meet optical reflectivity requirements the resulting film stress ... En savoir plus
This abstract introduces a sensor design for detecting angular acceleration in a single plane using thermal convection. The working principal of the device is based on probing temperature profile changes along a micro-torus caused by angular acceleration. By properly choosing the ... En savoir plus
INTRODUCTION: Researchers in the biomedical field have recently become interested in the potential applications of plasomics. Surface plasmon resonance based on optical properties of metallic nanostructures can be used for detection of special biological targets. Gold nanostructures with ... En savoir plus
Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS ... En savoir plus