Time-Dependent Study of Capacitively Coupled Plasma Using Fixed Power Condition
A power supply is generally used in many electrical devices. In order to deliver uniform power irrespective of time variation, most plasma equipment also uses a power source. Therefore, the power condition in plasma simulations is essential. In time-dependent models using a current source in COMSOL Multiphysics®, the value of applied current needs to be adjusted with time in order to fix the power and such logic is realized by using State Variable feature in this study.
Based on GEC CCP Reactor, Argon Chemistry tutorial model, a time-dependent Capacitively Coupled Plasma (CCP) study using a fixed power condition is successfully performed and the results are compared with those of the time-periodic model [1]. 20,000 RF cycles are considered for the periodic steady state in this study. Most results such as electron density, electron temperature, electric potential and so on are consistent with those of the time-periodic model. This study shows a possibility of applying power condition in time-dependent models and the logic is expected to be also adopted in AC/DC Module.
