Articles techniques et présentations

We have modeled surface acoustic wave (SAW) devices composed of piezoelectric materials: aluminum nitride (AlN), lithium niobate (LiNbO3), and quartz. These materials are often used in RF filters and wireless sensors, which require temperature compensation for stability. Using our COMSOL Multiphysics® simulation with published values of thermal expansion for each material, we simulated the TCF of each structure and observed the effects of the materials and the SiO2 trench shapes on the TCF.