Articles techniques et présentations

Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural Materials Module is implemented for elasto-plastic contact analysis on 3D RF MEMS surface using COMSOL Multiphyiscs® software. Only part of MEMS surface are modeled due to isotropy and homogeneity characteristics of the fractal surface. Contact area and structure deformation are calculated as a function of applied loading . Contact mechanics under cyclic loading/unloading will be investigated in the future.