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Design and Simulation of a MEMS Directional Acoustic Sensor

S. L. Pinjare [1], V. S. Nagaraja [1], K. S. Rudresh [1],
[1] Department of ECE , Nitte Meenakshi Institute of technology, Bangalore, Karnataka, India

Publié en 2016

A Piezoelectric Directional Microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea using the PiezoMUMPs multi-user foundry. The device simulation was conducted using COMSOL Multiphysics® software which achieves a directional sound field response and frequency band of 3.5 KHz to 4.5KHz. The sensitivity of the device is 3.8nV/pa.

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