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Semiconductor Manufacturing

Modeling and Simulation Across Industries   Semiconductor Manufacturing

Designing system components, optimizing manufacturing processes, and developing next-generation semiconductor devices calls for precision and accuracy. This is why industry leaders turn to multiphysics modeling and simulation to develop, test, and verify designs.

Browse content related to wafer production, fabrication, packaging, testing, and device design to see how the COMSOL Multiphysics® software is used in the semiconductor manufacturing industry.

Wafer Production Fabrication Packaging & Testing Devices
Model
Four-Point Bending Test of an IGBT Module
Blog Post
Preconditioning of Surface-Mount Devices for Reliability Testing
User Presentation
Overcoming Challenges in the Simulation of Vacuum Processing Hardware at Evatec AG
Video
MKS Instruments Models Transformer-Coupled Toroidal Plasma
Video
Tokyo Electron Ltd. Models Semiconductor Wet Processes
Blog Post
Modeling the Pulsed Laser Heating of Semitransparent Materials
Model
Microlithography Lens
Model
Reflow Soldering in IC Packaging
Blog Post
Analyzing Turbomolecular Pumps
User Presentation
Wire Bonding: A Thorough Numerical Methodology at STMicroelectronics
Model
Chemical Etching
Model
Photoresist Spin Coating
Blog Post
Modeling Wet Chemical Etching
Model
The Epitaxial Growth of SiC by the PVT Method
User Presentation
Thin Microchip Release From a Carrier Tape: Structural Mechanics and Vacuum Forces
Model
Preconditioning (PRE) of Surface-Mount Devices (SMDs) for Testing
Article
ASML Advances Computing Breakthroughs with Multiphysics Modeling
Model
Stress Analysis of an IGBT Module Under the Highly Accelerated Stress Test (HAST) Condition
Article
Besi Optimizes Memory Chip Manufacturing
Article
EMIX Optimized the Production Process for Photovoltaic-Quality Silicon
Model
Thermal Analysis of a Czochralski Crystal Growth Furnace
Model
Model of an Argon/Chlorine Inductively Coupled Plasma Reactor with RF Bias
Blog Post
Simulating UHV/CVD and Silicon Growth on a Wafer Substrate
Model
Trench-Gate IGBT 3D
User Presentation
Modeling Directed Self-Assembly of Block Copolymers for Lithographic Applications
Model
Ultrahigh Vacuum, Chemical Vapor Deposition
Model
3D Analysis of a Bipolar Transistor
Article
Lam Research Corporation Models Complex Physics to Speed Up Chip Development
Model
DC Characteristics of a MOS Transistor (MOSFET)
Model
Viscoplastic Creep in Solder Joints
Article
Tokyo Electron Ltd. Pushes the Limits of Chip Density
User Presentation
Experimental Validation of Model of Electro-Chemical-Mechanical Planarization (ECMP) of Copper
Model
Heating Circuit
Model
Laser Heating of a Silicon Wafer
Model
Molecular Flow in an Ion-Implant Vacuum System
Model
GEC CCP Reactor, Argon Chemistry
Model
3D ICP Reactor, Argon Chemistry

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Product Spotlight

It all starts with COMSOL Multiphysics®, the platform product for creating physics-based models and simulation apps. From there, you can add as many specialized modules and interfacing products as needed — they all connect seamlessly via the platform for a consistent modeling workflow regardless of what you are modeling.

Here are some suggested products to add to COMSOL Multiphysics® for modeling semiconductor manufacturing equipment, processes, and devices:

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Flexible License Options

COMSOL offers a variety of license types to meet the needs of different types of organizations and teams.

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