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MEMS Piezoresistive
Posted 26 mars 2015, 15:54 UTC−4 MEMS & Nanotechnology, Heat Transfer & Phase Change, MEMS & Piezoelectric Devices Version 5.0 0 Replies
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Someone knows if the MEMS module , punctually the Piezoresistive interface can manage the temperature effect on the piezoresistive coefficient? As we know the piezoresistive coefficient of silicon is highly dependent of the temperature, I want to model this on my pressure sensor. I add the thermal expansion physics, but this just account for the effect of the temperature on the expansion of the diaphragm of the sensor but no for the direct effect of the temperature on the piezoresistive coefficient.
Anyone knows if the MEMS module can manage this?
Regards
Rogelio
Hello Rogelio Hernandez Aguirre
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