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Design and Analysis of 2D Single Axis Capacitive Comb Drive Accelerometer

Posted 23 mai 2013, 02:30 UTC−4 Low-Frequency Electromagnetics, MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2a 0 Replies

Sunil Chaluvaiah
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Dear Sir,

We have been designed 2d Single Axis capacitive comb drive Accelerometer. when i computed electrostatics study to find capacitance i found a large difference between simulation and theoretical values,

below i have attached the same..

and could you please suggest me how i can improve the result..will be looking forward to your reply.

snap shot is also attached.
0 Replies Last Post 23 mai 2013, 02:30 UTC−4
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Hello Sunil Chaluvaiah

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