Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.
Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.
Deposition rate using particle tracing module
Posted 15 oct. 2012, 03:39 UTC−4 Fluid & Heat, Results & Visualization Version 4.3 1 Reply
Please login with a confirmed email address before reporting spam
I have modeled a reactor using the "fluid flow" and "particle tracing module". A substrate wafer is placed across the flow channel. I have implemented the boundary condition so that whenever a particle hits the wafer, it get stick/freeze with the wafer wall.
Now, If I want to calculate how many particles are stick with the wafer wall and rate of deposition from the result section, how I am supposed to do that?
Thank you.
Rokib
Hello Md Rokibul Islam
Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.
If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.
Please login with a confirmed email address before reporting spam
Did you find the answer to your question. I am thinking of modeling my chemical vapor deposition process on similar lines.
Thank you,
Sanket