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Quality Factor of a Double-clamped Beam
Posted 27 déc. 2022, 09:13 UTC−5 MEMS & Piezoelectric Devices, Structural Mechanics, Structural Dynamics Version 6.0 0 Replies
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Dear all,
I am now woking with a double-clamped beam resonator. However, when the slenderness ratio (h/L) is smaller than about 1/80, the solution from COMSOL is far away from the analytical solution by Zener's formula. When the ratio reaches about 1/300, the difference becomes unbelivable. My operation is mainly based on this example: https://www.comsol.com/model/thermoelastic-damping-in-a-mems-resonator-1439. A finer mesh cannot solve this issue. What may cause this issue and how can I solve that?
Hello Lingzhi Chen
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