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Modelling a electrostatic comb drive resonator
Posted 4 mars 2022, 11:31 UTC−5 0 Replies
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Hi,
I am trying to model a electrostatic comb drive resonator in COMSOL. I want to do a time domain analysis for it, however the computation time taken is too long for my model. I went through this "https://extras.csc.fi/math/comsol/3.5/doc/mems/memsmodlib.pdf" document which mentions on page 37 about periodic approximation which can be used to model comb drives with many teeth. Can someone give me an example comb drive resonator simulation using the periodic approximation? I am new to comsol and I am not sure how to proceed. I have attached an image of my resonator design.
Thanks, Chandrashekhar
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Hello Chandrashekhar Choudhary
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