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Using COMSOL for inertial (dynamic) MEMS Development
Posted 25 janv. 2010, 13:13 UTC−5 1 Reply
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Hello All,
I am interested in the development of inertial mems like accelerometers and gyros. I was wondering if anyone has first hand experience in developing dynamic inertial MEMS devices using COMSOL. What aspects of your devices have you been able to simulate (static, dynamic & electrical) ? Can one perform all the related simulations as with Ansys (which aspects)? How do they compare (incl. results) ?
Many thanks in advance!
Vinodh R
I am interested in the development of inertial mems like accelerometers and gyros. I was wondering if anyone has first hand experience in developing dynamic inertial MEMS devices using COMSOL. What aspects of your devices have you been able to simulate (static, dynamic & electrical) ? Can one perform all the related simulations as with Ansys (which aspects)? How do they compare (incl. results) ?
Many thanks in advance!
Vinodh R
1 Reply Last Post 26 janv. 2010, 03:25 UTC−5
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Posted:
1 decade ago
Hi
I have done about everything (and more than with other tools) so far for mems and other larger structures and to now I have found no major discrepancies, in fact I havnt checked COMSOL results agains other FEM tools for a years time as I trust it fully.
I'm only missing structual eigenmode mass participations factors that are NOT readily calculated by COMSOL as with ASNSYS or NASTRAN or COSMOS or... but I expect this to come in V4.
But still, the most common errors/discrepancies, by far, are wrong BC's and not wrong FEM tool calculations.
Good luck with COMSOL ;)
Ivar
I have done about everything (and more than with other tools) so far for mems and other larger structures and to now I have found no major discrepancies, in fact I havnt checked COMSOL results agains other FEM tools for a years time as I trust it fully.
I'm only missing structual eigenmode mass participations factors that are NOT readily calculated by COMSOL as with ASNSYS or NASTRAN or COSMOS or... but I expect this to come in V4.
But still, the most common errors/discrepancies, by far, are wrong BC's and not wrong FEM tool calculations.
Good luck with COMSOL ;)
Ivar