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Capacitive Presure Sensor

Posted 18 mars 2012, 11:17 UTC−4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2 0 Replies

Sanjay Mukuntha Madhava
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I have to design a Parallel plate Capacitive Pressure Sensor. The plates are Circular and are both fixed. When pressure is applied, the plate deforms and the capacitance changes.
Can someone please tell me how to couple Electro statics and Structural Mechanics?

Thanks in advance
Sanjay
0 Replies Last Post 18 mars 2012, 11:17 UTC−4
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Hello Sanjay Mukuntha Madhava

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