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resonator beam displacement

Posted 10 oct. 2011, 23:34 UTC−4 Version 4.2 0 Replies

Anis Nurashikin Nordin
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Hi,

I am designing a resonator beam. the main objective is about dispalcement. I know that comsol will give the BIG displacement. I need some help from anyone who knows about MEMS simulation in comsol. Currently, I am using comsol 4.2. Attached is the details about my model.

I need to apply voltage 0-10V towards this model and will yield the displacement in (micrometer).


Really appreciated. thanks

Best Regards.

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0 Replies Last Post 10 oct. 2011, 23:34 UTC−4
COMSOL Moderator

Hello Anis Nurashikin Nordin

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