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thermo-mechanical stresses in MEMS measured by thin film strain guages

Posted 18 août 2011, 10:25 UTC−4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices 0 Replies

umer sajjad
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Hi guys,
how is the relation between the stresses induced in multilayer MEMS (dielectric layers on silicon wafer) and elecctrical resistance measured via thin film strain guages(surface machined) in MEMS-stack.
i need your ideas....
Regards
0 Replies Last Post 18 août 2011, 10:25 UTC−4
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