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Finding force within an electrical field using electrostatics

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Hi,

I am modeling a mems resonator. The resonator has electrodes attached to it (rectangle bars in image). Underneath the electrodes are another set of electrodes which are fixed. Electrodes attached to the resonator (mass) are movable (top electrodes). I am applying a positive and negative dc and ac voltages to the fixed electordes. Thus producing an electric field. This electric field is suppose to push the movable elctrodes, which are right above the fixed ones, away from the fixed electrodes (out of place displacement). Unfortunetly this is not happeing. I have tried various changes to my model. I am getting various errors.
I have also included an air domain (with and without it; i am getting errors). When i chose the air as the material, it asked me for young's modulus and possion's ratio. This doesnt make sense to me, but i think the problem is deeper. If someone can help me getting this simulation running that would be greatly appreaciated. Thanks in advance.

-Nabeel



0 Replies Last Post 6 sept. 2018, 00:47 UTC−4
COMSOL Moderator

Hello Nabeel Khan

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