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gas ion bombardment/sputtering effect

Posted 4 mai 2016, 18:41 UTC−4 Low-Frequency Electromagnetics, Plasma Physics, Modeling Tools & Definitions, Parameters, Variables, & Functions 0 Replies

Tao Zheng
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Hi, All,
I have an electron source (cathode) in a high vacuum environment with certain gas pressure. when the electron travel from the cathode to the anode, it will collide with the gas in the path and ionize it, the generated gas positive ion will flow the opposite direction due to the electrostatic force, and finally hit the cathode. I wonder if COMSOL could simulate this ion sputtering effect on the cathode.

regards,
tao
0 Replies Last Post 4 mai 2016, 18:41 UTC−4
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Hello Tao Zheng

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