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frequency and displacement

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Hello,

I'm trying to design a capacitive accelerometer with electrostatic combs on two opposite sides of the proof mass and spring on the other two. Using Solid Mechanics, I want to get a displacement of not more than 200 micrometer and an eigenfrequency of 1000Hz for a pressure of 22 bar. But for less displacement, I'm getting a high frequency and vice versa. Is there any way I can reduce both the parameters simultaneously.

0 Replies Last Post 10 févr. 2016, 08:45 UTC−5
COMSOL Moderator

Hello Swathi S

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